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0.84 -0.24 l
0.24 -0.42 l
f*
1 0 0 1 2.64 0.9 cm
0 0 m
0.84 0.18 l
0.84 -0.24 l
0 -0.48 l
f*
1 0 0 1 2.16 0.84 cm
0 0 m
0.9 0.42 l
1.08 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.9 0.24 l
0.9 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.24 l
0.9 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.66 0.42 l
0.9 0 l
0.24 -0.48 l
f*
1 0 0 1 2.4 0.84 cm
0 0 m
0.9 0.42 l
1.14 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.9 0.24 l
0.9 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.24 l
0.9 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.66 0.42 l
0.9 0 l
0.24 -0.48 l
f*
1 0 0 1 2.46 0.84 cm
0 0 m
0.84 0.48 l
1.08 0 l
0.18 -0.42 l
f*
1 0 0 1 2.58 1.08 cm
0 0 m
0.9 0.24 l
0.9 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.46 0.9 cm
0 0 m
0.84 0.24 l
0.84 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.16 0.9 cm
0 0 m
0.9 0.42 l
1.08 0 l
0.24 -0.48 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.66 0.24 l
0.84 -0.24 l
0.18 -0.42 l
f*
1 0 0 1 2.64 0.84 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.16 0.9 cm
0 0 m
0.9 0.42 l
1.08 0 l
0.24 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.42 l
1.08 0 l
0.24 -0.48 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.66 0.24 l
0.9 -0.24 l
0.24 -0.42 l
f*
1 0 0 1 2.64 0.84 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.16 0.9 cm
0 0 m
0.9 0.42 l
1.14 0 l
0.24 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.42 l
1.14 0 l
0.24 -0.48 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.9 0.24 l
0.9 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.4 0.84 cm
0 0 m
0.66 0.24 l
0.9 -0.18 l
0.24 -0.42 l
f*
1 0 0 1 2.46 0.9 cm
0 0 m
0.84 0.42 l
1.08 0 l
0.18 -0.42 l
f*
1 0 0 1 2.58 1.08 cm
0 0 m
0.9 0.24 l
0.9 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.24 l
0.9 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.46 0.9 cm
0 0 m
0.66 0.42 l
0.84 0 l
0.18 -0.48 l
f*
1 0 0 1 2.4 0.84 cm
0 0 m
0.66 0.42 l
0.84 0 l
0.18 -0.42 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.84 0.24 l
0.84 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.16 0.9 cm
0 0 m
0.9 0.42 l
1.08 0 l
0.24 -0.48 l
f*
1 0 0 1 2.64 0.84 cm
0 0 m
0.66 0.42 l
0.9 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.84 0.24 l
0.84 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.16 0.9 cm
0 0 m
0.9 0.42 l
1.14 0 l
0.24 -0.48 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.66 0.18 l
0.9 -0.24 l
0.24 -0.48 l
f*
1 0 0 1 2.4 0.84 cm
0 0 m
0.66 0.24 l
0.9 -0.18 l
0.24 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.42 l
1.14 0 l
0.24 -0.42 l
f*
1 0 0 1 2.46 0.9 cm
0 0 m
0.84 0.42 l
1.08 0 l
0.18 -0.48 l
f*
1 0 0 1 2.58 1.08 cm
0 0 m
0.9 0.18 l
0.9 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.46 0.84 cm
0 0 m
0.6 0.24 l
0.84 -0.18 l
0.18 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.84 0.42 l
1.08 0 l
0.18 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.84 0.42 l
1.08 0 l
0.18 -0.48 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.84 0.18 l
0.84 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.4 0.84 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.66 0.42 l
0.84 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.84 0.18 l
0.84 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.16 0.84 cm
0 0 m
0.9 0.48 l
1.14 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 0.9 cm
0 0 m
0.66 0.42 l
0.9 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 1.08 cm
0 0 m
0.84 0.24 l
0.84 -0.18 l
0 -0.42 l
f*
1 0 0 1 2.4 0.9 cm
0 0 m
0.9 0.18 l
0.9 -0.24 l
0 -0.42 l
f*
1 0 0 1 2.16 0.84 cm
0 0 m
0.9 0.48 l
1.14 0 l
0.24 -0.42 l
f*
1 0 0 1 2.64 1.14 cm
0 0 m
0.9 0.18 l
0.9 -0.24 l
0 -0.48 l
f*
1 0 0 1 -261.3 -431.22 cm
BT
0 g
/TT1 1 Tf
5.0358 0 0 5.0341 70.44 358.62 Tm
(0)Tj
0.01579 Tc -0.5719 2.3837 Td
(10)Tj
0 2.3957 TD
(20)Tj
T*
(30)Tj
0 2.4314 TD
(40)Tj
0 2.3837 TD
(50)Tj
0 2.3956 TD
(60)Tj
T*
(70)Tj
0.0038 Tc 1.6561 -18.2236 Td
[(0)-2216.2 (5)-12 (0)-1656.2 (10)-12 (0)-1394.1 (1)-12 (50)-1394.1 (2)-12 (00)-1358.3 (25)-12 (0)-1394.1 (30)-12 (0)-1394.1 (35)-12 (0)-1394.1 (40)-12 (0)-1346.4 (4)-12 (50)-1394.1 (5)-12 (00)-1406 (550)-1358.3 (60)-12 (0)-1394.1 (6)-11.9 (50)]TJ
/TT2 1 Tf
0.01649 Tc -0.0322 Tw 16.0848 -1.6805 Td
[(Nu)-28 (m)83.5 (b)19.7 (er)12.5 ( o)19.7 (f)4 ( c)12.7 (y)96.1 (cles)]TJ
0.00459 Tc -0.02029 Tw 0 5.0358 -5.0341 0 63.96 383.7 Tm
[(T)7.8 (h)7.8 (i)20.3 (ckness)-11.2 ( \()-7.9 (n)7.8 (m)24 (\))]TJ
/TT0 1 Tf
0 Tc 0 Tw 10.02 0 0 10.02 287.46 336.12 Tm
( )Tj
/TT3 1 Tf
-0.00011 Tc -0.00439 Tw -23.2994 -0.9162 Td
[(Figure)6.6 ( )-6 (1. STO thickness )-6 (v)6.6 (a)-3.1 (ri)8.3 (a)]TJ
-0.0005 Tc 0.002 Tw [-0.1 (tion with )6 (number of cycles )]TJ
-0.00211 Tc -0.0024 Tw 0 -1.1497 TD
[(fo)-5.1 (r d)-5.1 (e)-1.4 (po)-5.1 (sitio)-5.1 (n o)-5.1 (n)0.9 ( )-6 (S)-5.1 (i)0.3 (. )]TJ
/TT0 1 Tf
0 Tc 0 Tw T*
( )Tj
0.00191 Tc -0.00639 Tw 0 -1.1437 TD
[( )-3347.3 (XR)4.2 (D )-6 (m)13.3 (easure)8.6 (m)7.3 (ent)4.3 (s)1.8 ( )-6 (carri)4.3 (e)8.6 (d)-1.1 ( out)4.3 ( o)4.9 (n)-1.1 ( 45)4.9 (nm)13.3 ( )-6 (t)4.3 (h)-1.1 (i)4.3 (c)2.6 (k )]TJ
0.0015 Tc 0 Tw 0 -1.1497 TD
[(STO l)3.9 (a)2.2 (y)4.5 (e)2.2 (r)5.2 (s)1.4 ( )6 (de)8.2 (posi)3.9 (t)3.9 (e)8.2 (d )6 (on)4.5 ( Si)3.9 ( s)7.4 (h)-1.5 (o)4.5 (w)-0.9 ( t)9.9 (h)-1.5 (at)3.9 ( t)3.9 (h)-1.5 (e )6 (as)7.4 (-de)8.2 (p)4.5 (osi)3.9 (t)3.9 (e)2.2 (d )]TJ
0.0002 Tc 0.0013 Tw T*
[(layers are am)11.6 (orphous)6.1 (. )6 (Whe)6.9 (n)-2.8 ( )6 (subjecte)6.9 (d)-2.8 ( to a )6 (post)8.6 ( )]TJ
-0.00169 Tc 0.0032 Tw 0 -1.1437 TD
[(d)-4.7 (e)-1 (po)-4.7 (sition)-4.7 ( an)-4.7 (neal \(PDA\) )6 (o)-4.7 (f)2 ( 2min)-4.7 ( in)-4.7 ( N)]TJ
0 Tc 0 Tw 6.48 0 0 6.48 207.42 256.44 Tm
(2)Tj
-0.0011 Tc 0.00259 Tw 10.02 0 0 10.02 210.6 257.94 Tm
[( \(with)-4.1 ( )6 (1)-4.1 (m)10.3 (in)-4.1 ( ram)10.3 (p)-4.1 (-)]TJ
-0.0004 Tc 0.00191 Tw -15.6287 -1.1497 Td
[(up\), these layers crystallize at a te)-5.7 (m)11 (p)-3.4 (erature )6 (betwee)6.3 (n )6 (500 )]TJ
-0.0006 Tc 0.00211 Tw 0 -1.1497 TD
[(and 600\272C )6 (\(Figure)6.1 ( 2\). )6 ( T)5.4 (h)-3.6 (ro)]TJ
-0.00079 Tc 0.0023 Tw 11.1257 0 Td
[(ugh c)5.9 (r)-3.1 (ystallizatio)-9.8 (n the)5.9 ( s)5.1 (u)-3.8 (rface )]TJ
-0.0014 Tc 0.0029 Tw -11.1257 -1.1437 Td
[(r)-3.7 (oug)-4.4 (hn)-4.4 (ess )6 (of)-3.7 ( t)7 (h)-4.4 (e layer)-3.7 (s)-1.5 ( i)7 (n)-4.4 (cr)-3.7 (ease)]TJ
-0.00031 Tc 0.0018 Tw 12.7485 0 Td
[(s, as)5.6 ( expect)8.1 (ed )6 (\(Figure)6.4 ( 3\). )6 ( )]TJ
0 Tc 0 Tw -12.7485 -1.1497 Td
( )Tj
-0.00031 Tc -0.0042 Tw 3.5928 -1.1497 Td
(The dielectric constant va)Tj
0.00011 Tc 0.0014 Tw 10.2814 0 Td
[(lue )6 (extracted from)11.5 ( CV )]TJ
-0.00101 Tc 0.0025 Tw -13.8743 -1.1437 Td
[(measu)-4 (r)-3.3 (em)10.4 (en)-4 (ts o)-4 (n)2 ( Pt/STO/Pt )]TJ
-0.0006 Tc 0.00211 Tw 11.5569 0 Td
[(MIM capacitor struct)7.8 (ures)5.3 ( is )]TJ
-0.0023 Tc 0.0038 Tw -11.5569 -1.1497 Td
[(~ 36)-5.3 ( for th)-5.3 (e as-d)-5.3 (epo)-5.3 (s)-2.4 (ited STO )]TJ
-0.00011 Tc 0.0016 Tw 12.2934 0 Td
[(layers. )6 (IV m)11.3 (e)-5.4 (asurem)11.3 (ents )]TJ
-0.00191 Tc 0.0034 Tw -12.2934 -1.1497 Td
[(sh)-4.9 (ow)-4.3 ( )6 (v)-4.9 (e)4.8 (r)-4.2 (y)1.1 ( good)-4.9 ( leak)-4.9 (ag)-4.9 (e )6 (cur)-4.2 (r)-4.2 (e)4.8 (n)-4.9 (t)0.5 ( d)-4.9 (e)4.8 (n)-4.9 (s)-2 (ity v)-4.9 (a)-1.2 (l)6.5 (u)1.1 (es fo)-4.9 (r th)-4.9 (e as-)]TJ
-0.00169 Tc 0.0032 Tw 0 -1.1437 TD
[(d)-4.7 (e)-1 (po)-4.7 (sited layers, ~ )6 (1)-4.7 (E)-1.6 (-9A)-4.1 (/)0.7 (cm)]TJ
0 Tc 0 Tw 6.48 0 0 6.48 173.22 158.94 Tm
(2)Tj
0.0015 Tc 10.02 0 0 10.02 176.46 154.44 Tm
(. )Tj
-0.00121 Tc 0.0027 Tw 14.7246 77.0838 Td
[( )-3341.3 (Th)-4.2 (e )6 (STO layers crystallized)-4.2 ( fo)-4.2 (llo)-4.2 (wi)7.2 (n)-4.2 (g)1.8 ( PDA )6 (at )]TJ
-0.00011 Tc 0.0016 Tw 0 -1.1497 TD
[(600\272C)8.2 ( are c)6.6 (h)-3.1 (a)6.6 (r)3.6 (acterized )6 (by )]TJ
-0.00031 Tc 0.0018 Tw 11.006 0 Td
[(a )6 (dielectric const)8.1 (a)0.4 (nt val)8.1 (u)-3.3 (e )]TJ
0.0011 Tc 0.0004 Tw -11.006 -1.1437 Td
[(>17)4.1 (0)-1.9 (,)5.6 ( b)4.1 (u)-1.9 (t)3.5 ( al)3.5 (s)7 (o)-1.9 ( )6 (by)4.1 ( a s)7 (u)4.1 (bst)3.5 (a)1.8 (n)]TJ
-0.0007 Tc 0.0022 Tw [-0.1 (tial increase i)7.6 (n)-3.7 ( t)7.7 (h)2.3 (e leakage )]TJ
-0.0011 Tc -0.0034 Tw T*
[(cu)-4.1 (rren)-4.1 (t d)-4.1 (e)5.6 (n)-4.1 (s)-1.2 (ity. )]TJ
0 Tc 0 Tw T*
( )Tj
0 -1.1437 TD
( )Tj
3.3428 Tc 0 -1.1497 TD
( )Tj
0 Tc T*
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
/TT3 1 Tf
-0.0014 Tc 0.0029 Tw 0 -1.1437 TD
[(Fig)-4.4 (u)-4.4 (r)-1.5 (e 2. XRD resu)-4.4 (lts )6 (ob)-4.4 (ta)-4.4 (ined)-4.4 ( for )6 (4)-4.4 (5nm th)-4.4 (i)7 (ck S)-4.4 (T)3.8 (O l)7 (a)-4.4 (yers )]TJ
0.0016 Tc -0.0061 Tw 0 -1.1497 TD
[(dep)4.6 (o)-1.4 (si)4 (t)4 (e)2.3 (d)4.6 ( )-6 (o)4.6 (n)-1.4 ( Si)10 (, )-6 (as)7.5 (-)5.3 (d)-1.4 (ep)4.6 (osi)4 (t)4 (e)2.3 (d)4.6 ( an)4.6 (d af)4 (t)4 (e)2.3 (r )-6 (P)7.7 (D)-0.8 (A at)4 ( )-6 (5)4.6 (0)4.6 (0)-1.4 (\272C)3.9 ( a)4.6 (n)-1.4 (d)4.6 ( )]TJ
-0.00101 Tc 0.0025 Tw T*
[(6)-4 (0)2 (0)-4 (\272)-2.3 (C)7.3 ( fo)-4 (r )6 (2min)-4 ( in N)]TJ
0 Tc 0 Tw 6.48 0 0 6.48 404.94 683.82 Tm
(2)Tj
-0.0045 Tc 10.02 0 0 10.02 408.18 685.32 Tm
(. )Tj
/TT0 1 Tf
0 Tc -8.4012 -1.1437 Td
( )Tj
T*
( )Tj
T*
( )Tj
3.5928 -1.1437 Td
( )Tj
T*
( )Tj
-3.5928 -1.1497 Td
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
0 -1.1437 TD
( )Tj
0 -1.1497 TD
( )Tj
T*
( )Tj
0 -1.1437 TD
( )Tj
/TT3 1 Tf
0.0013 Tc 0.0002 Tw 0 -1.1497 TD
[(Fi)3.7 (gure)8 ( 3)4.3 (.)-0.2 ( AF)7.4 (M)8 ( resul)3.7 (t)3.7 (s)1.2 ( s)7.2 (h)4.3 (ow)3.6 (i)3.7 (n)4.3 (g t)3.7 (h)-1.7 (e)8 ( RM)8 (S )6 (of)3.7 ( t)9.7 (h)-1.7 (e s)7.2 (u)-1.7 (rf)3.7 (ace)8 ( )]TJ
-0.00211 Tc 0.0036 Tw T*
[(ro)-5.1 (ugh)-5.1 (ness va)-5.1 (lues ob)-5.1 (ta)-5.1 (i)6.3 (n)-5.1 (ed fo)-5.1 (r 45)-5.1 (nm)-4.5 ( t)6.3 (h)-5.1 (ick STO)-4.5 ( la)-5.1 (yers )]TJ
0.0018 Tc -0.0063 Tw 0 -1.1437 TD
[(dep)4.8 (o)-1.2 (si)4.2 (t)4.2 (e)2.5 (d)4.8 ( )-6 (o)4.8 (n)-1.2 ( Si)10.2 (, )-6 (as)7.7 (-)5.5 (d)-1.2 (ep)4.8 (osi)4.2 (t)4.2 (e)2.5 (d)4.8 ( an)4.8 (d )-6 (f)10.2 (o)-1.2 (l)4.2 (l)4.2 (o)-1.2 (w)4.1 (i)4.2 (n)4.8 (g)-1.2 ( PDA at)4.2 ( 50)4.8 (0\272C)10.1 ( )]TJ
0.00259 Tc -0.0011 Tw 0 -1.1497 TD
[(an)5.6 (d )6 (6)5.6 (0)-0.4 (0)5.6 (\272)1.3 (C)4.9 ( f)5 (o)-0.4 (r)8.5 ( )6 (2mi)11 (n)-0.4 ( i)5 (n)5.6 ( N)]TJ
0 Tc 0 Tw 6.48 0 0 6.48 422.4 396.36 Tm
(2)Tj
-0.0045 Tc 10.02 0 0 10.02 425.64 397.86 Tm
(. )Tj
/TT0 1 Tf
0 Tc -10.1437 -1.1497 Td
( )Tj
0.0015 Tw 0 -1.1437 TD
[( )-3341.3 (Experim)11.4 (e)0.7 (nts designe)6.7 (d t)8.4 (o)-3 ( a)6.7 (d)-3 (dress the i)8.4 (n)-3 (creas)5.9 (e in )]TJ
-0.00169 Tc 0.0032 Tw 0 -1.1497 TD
[(th)-4.7 (e leak)-4.7 (ag)-4.7 (e cu)-4.7 (rren)-4.7 (t )6 (d)-4.7 (e)5 (n)-4.7 (s)-1.8 (ity o)-4.7 (f)2 ( )6 (th)-4.7 (e crystallized STO layers )]TJ
-0.0006 Tc -0.00391 Tw T*
(are on-going. )Tj
0 Tc 0 Tw 0 -1.1437 TD
( )Tj
0.0027 Tc 0 -1.1497 TD
([1])Tj
0 Tc 6.48 0 0 6.48 335.7 333.36 Tm
( )Tj
-0.0007 Tc 0.0022 Tw 10.02 0 0 10.02 337.32 328.86 Tm
(S.W. Lee )Tj
/TT3 1 Tf
0.00011 Tc 0.0014 Tw 3.994 0 Td
[(et)8.5 ( al.)]TJ
/TT0 1 Tf
0.0002 Tc [-0.5 (,)4.7 ( A)3.8 (p)3.2 (pl. P)5.5 (h)-2.8 (y)9.2 (s)0.1 (. Lett. )]TJ
/TT4 1 Tf
0.00301 Tc 0 Tw 9.5269 0 Td
(92)Tj
/TT0 1 Tf
-0.0027 Tc -0.0018 Tw 1 0 Td
[(, 2)-5.7 (229)-5.7 (03)-5.7 ( \(2)-5.7 (008)-5.7 (\) )]TJ
-0.0031 Tc -0.0014 Tw -15.8503 -1.1437 Td
[([)-5.4 (2)-6.1 (] N)-5.5 (.)-4.6 ( )-6 (Meno)-6.1 (u )]TJ
/TT3 1 Tf
-0.0007 Tc 0 Tw 5.7066 0 Td
(et)Tj
/TT0 1 Tf
0 Tc 0.7186 0 Td
( )Tj
/TT3 1 Tf
0.00301 Tc 0.2515 0 Td
[(al)5.4 (.)]TJ
/TT0 1 Tf
-0.00211 Tc -0.0024 Tw 1.0299 0 Td
[(, I)-4.4 (E)4 (D)-4.5 (M)0.8 ( 20)-5.1 (08 )]TJ
0.0025 Tc -0.00101 Tw -7.7066 -1.1497 Td
[([3])6.2 ( M)5.4 (.)1 ( )6 (Po)5.5 (p)5.5 (ovi)4.9 (c)9.2 (i)4.9 ( )]TJ
/TT3 1 Tf
-0.0002 Tc 0.00169 Tw 6.5988 0 Td
(et al.)Tj
/TT0 1 Tf
0.00031 Tc 0.00121 Tw 2 0 Td
[(, )6 (J. Elect)8.7 (roc)7 (h)-2.7 (em)11.7 (. Soc. )]TJ
/TT4 1 Tf
-0.00301 Tc 0 Tw 8.9222 0 Td
[(15)-6 (7)]TJ
/TT0 1 Tf
-0.00391 Tc 0.0054 Tw [( \(1)-6.9 (\),)-5.4 ( )6 (G)-6.3 (1)-0.9 (-)]TJ
-0.0034 Tc 0.0049 Tw -17.521 -1.1497 Td
[(G)-5.8 (6)-0.4 ( \(2)-6.4 (010)-6.4 (\) )]TJ
0.0027 Tc 0 Tw 0 -1.1437 TD
([4])Tj
0 Tc 6.48 0 0 6.48 335.7 287.4 Tm
( )Tj
-0.0007 Tc 0.0022 Tw 10.02 0 0 10.02 337.32 282.9 Tm
(S.W. Lee )Tj
/TT3 1 Tf
0.00011 Tc 0.0014 Tw 3.994 0 Td
[(et)8.5 ( al.)]TJ
/TT0 1 Tf
-0.0032 Tc 0.0047 Tw [-0.5 (, ALD 200)-6.2 (9 )]TJ
0.00169 Tc -0.0002 Tw -5.3234 -1.1497 Td
[([5])5.4 ( E)7.8 (.)0.2 ( La)8.4 (nge)8.4 (rei)10.1 (s)1.6 ( )]TJ
/TT3 1 Tf
-0.0002 Tc 0.00169 Tw [-0.3 (et al.)]TJ
/TT0 1 Tf
-0.00211 Tc -0.0024 Tw 8.7006 0 Td
[(, A)-4.5 (L)-2 (D )-6 (20)-5.1 (09 )]TJ
ET
q
361.2 630.6 88.68 29.1 re
W n
q
88.8 0 0 29.1 361.2 630.6 cm
1.1437 TL /Im0 Do
Q
Q
q
361.2 601.5 88.68 29.1 re
W n
q
88.8 0 0 29.1 361.2 601.5 cm
1.1437 TL /Im1 Do
Q
Q
q
361.2 572.7 88.68 28.8 re
W n
q
88.8 0 0 28.8 361.2 572.7 cm
1.1437 TL /Im2 Do
Q
Q
/CS0 cs 1 1 1 scn
403.8 577.98 42.54 8.34 re
f
BT
0 g
/TT5 1 Tf
0.0027 Tc 0 Tw 7.1116 0 0 7.1107 386.76 660.36 Tm
[(As)13.5 (-d)7.8 (ep)7.8 (osit)-5 (e)8.3 (d)]TJ
0.006 Tc -0.00281 Tw 6.5428 0 0 6.5419 405.18 580.2 Tm
[(RM)18 (S)11 (=)8.8 ( 0.)7.2 (31 n)19.9 (m)]TJ
4.047 Tc 0 Tw 5.9027 0 0 5.9018 391.32 568.56 Tm
(12)Tj
0 Tc 9.3821 -0.0407 Td
(3)Tj
-14.2002 0 Td
(0)Tj
-0.8538 0.8946 Td
(0)Tj
0 4.5546 TD
(1)Tj
0 4.8494 TD
(2)Tj
0 4.829 TD
(3)Tj
ET
q
464.16 630.9 87.18 29.1 re
W n
q
87.36 0 0 29.1 464.1 630.9 cm
-4.829 TL /Im3 Do
Q
Q
q
464.16 601.8 87.18 29.1 re
W n
q
87.36 0 0 29.1 464.1 601.8 cm
-4.829 TL /Im4 Do
Q
Q
q
464.16 572.94 87.18 28.86 re
W n
q
87.36 0 0 29.1 464.1 572.7 cm
-4.829 TL /Im5 Do
Q
Q
BT
/TT5 1 Tf
5.9027 0 0 5.9018 461.76 573.6 Tm
(0)Tj
0 4.5546 TD
(1)Tj
0 4.8494 TD
(2)Tj
0 4.829 TD
(3)Tj
4.0267 Tc 5.3975 -15.087 Td
(12)Tj
0 Tc 9.3719 -0.0407 Td
(3)Tj
-14.2103 0 Td
(0)Tj
0.0004 Tc 7.1116 0 0 7.1107 491.7599 661.56 Tm
[(PD)6.4 (A-)-233.4 (5)-7.4 (0)1 (0)]TJ
/TT6 1 Tf
0 Tc 3.8304 0 Td
(\373)Tj
/TT5 1 Tf
0.329 0 Td
(C)Tj
ET
/CS0 cs 1 1 1 scn
505.68 577.98 42.48 8.34 re
f
BT
0 g
/TT5 1 Tf
-0.0032 Tc 0.00639 Tw 6.5428 0 0 6.5419 506.9999 580.2 Tm
[(R)-8.8 (M)-0.4 (S)10.9 (=)-9.5 ( 0.)-11.2 (32)-9.9 ( nm)]TJ
ET
q
350.76 470.4 7.74 94.2 re
W n
q
8.16 0 0 94.2 350.7 470.4 cm
-4.829 TL /Im6 Do
Q
Q
BT
/TT5 1 Tf
0.00211 Tc 0 Tw 5.9027 0 0 5.9018 342.66 566.88 Tm
(nm)Tj
-0.002 Tc -0.8538 -13.6637 Td
[(-0)6.8 (.5)]TJ
0 Tc 0.8538 2.4704 Td
(0)Tj
-0.0088 Tc -0.2846 8.0518 Td
[(1.)-6 (5)]TJ
0 Tc 0.2846 -2.6433 Td
(1)Tj
-0.0007 Tc -0.5794 -2.4704 Td
(0.5)Tj
0.0058 Tc 11.0999 7.6858 Td
(\265m)Tj
17.0362 -0.3253 Td
(\265m)Tj
0 5.9027 -5.9018 0 356.28 614.28 Tm
(\265m)Tj
0.2744 -17.6082 Td
(\265m)Tj
ET
q
415.8 523.5 88.62 29.7 re
W n
q
88.8 0 0 29.7 415.8 523.5 cm
-4.829 TL /Im7 Do
Q
Q
q
415.8 493.8 88.62 29.7 re
W n
q
88.8 0 0 29.7 415.8 493.8 cm
-4.829 TL /Im8 Do
Q
Q
q
415.8 464.34 88.62 29.46 re
W n
q
88.8 0 0 29.7 415.8 464.1 cm
-4.829 TL /Im9 Do
Q
Q
BT
/TT5 1 Tf
0 Tc 5.9027 0 0 5.9018 413.16 465.6 Tm
(0)Tj
4.3214 Tc 5.3975 -0.854 Td
(12)Tj
0 Tc 9.6464 -0.0407 Td
(3)Tj
-14.4746 0 Td
(0)Tj
ET
/CS0 cs 1 1 1 scn
458.52 469.98 42.6 8.34 re
f
BT
0 g
/TT5 1 Tf
-0.0036 Tc 0.00681 Tw 6.5428 0 0 6.5419 460.56 472.26 Tm
[(RMS= 0.)-11.6 (4)-10.3 (3)-1.1 ( nm)]TJ
0 Tc 0 Tw 5.9027 0 0 5.9018 411.42 492.72 Tm
(1)Tj
T*
(2)Tj
0 4.8392 TD
(3)Tj
-0.0007 Tc 7.1116 0 0 7.1107 449.88 554.04 Tm
[(PD)5.3 (A)-10.6 (-)-226.1 (6)-8.5 (0)-0.1 (0)]TJ
/TT6 1 Tf
0 Tc [-0.3 (\373)]TJ
/TT5 1 Tf
4.1594 0 Td
(C)Tj
0.0058 Tc 5.9027 0 0 5.9018 456.78 452.64 Tm
(\265m)Tj
0 5.9027 -5.9018 0 411.6 506.7 Tm
(\265m)Tj
ET
q
361.2 630.6 88.68 29.1 re
W n
q
88.8 0 0 29.1 361.2 630.6 cm
-4.8392 TL /Im0 Do
Q
Q
q
361.2 601.5 88.68 29.1 re
W n
q
88.8 0 0 29.1 361.2 601.5 cm
-4.8392 TL /Im1 Do
Q
Q
q
361.2 572.7 88.68 28.8 re
W n
q
88.8 0 0 28.8 361.2 572.7 cm
-4.8392 TL /Im2 Do
Q
Q
/CS0 cs 1 1 1 scn
403.8 577.98 42.54 8.34 re
f
BT
0 g
/TT5 1 Tf
0.0027 Tc 7.1116 0 0 7.1107 386.76 660.36 Tm
[(As)13.5 (-d)7.8 (ep)7.8 (osit)-5 (e)8.3 (d)]TJ
0.006 Tc -0.00281 Tw 6.5428 0 0 6.5419 405.18 580.2 Tm
[(RM)18 (S)11 (=)8.8 ( 0.)7.2 (31 n)19.9 (m)]TJ
4.047 Tc 0 Tw 5.9027 0 0 5.9018 391.32 568.56 Tm
(12)Tj
0 Tc 9.3821 -0.0407 Td
(3)Tj
-14.2002 0 Td
(0)Tj
-0.8538 0.8946 Td
(0)Tj
0 4.5546 TD
(1)Tj
0 4.8494 TD
(2)Tj
0 4.829 TD
(3)Tj
ET
q
464.16 630.9 87.18 29.1 re
W n
q
87.36 0 0 29.1 464.1 630.9 cm
-4.829 TL /Im3 Do
Q
Q
q
464.16 601.8 87.18 29.1 re
W n
q
87.36 0 0 29.1 464.1 601.8 cm
-4.829 TL /Im4 Do
Q
Q
q
464.16 572.94 87.18 28.86 re
W n
q
87.36 0 0 29.1 464.1 572.7 cm
-4.829 TL /Im5 Do
Q
Q
BT
/TT5 1 Tf
5.9027 0 0 5.9018 461.76 573.6 Tm
(0)Tj
0 4.5546 TD
(1)Tj
0 4.8494 TD
(2)Tj
0 4.829 TD
(3)Tj
4.0267 Tc 5.3975 -15.087 Td
(12)Tj
0 Tc 9.3719 -0.0407 Td
(3)Tj
-14.2103 0 Td
(0)Tj
0.0004 Tc 7.1116 0 0 7.1107 491.7599 661.56 Tm
[(PD)6.4 (A-)-233.4 (5)-7.4 (0)1 (0)]TJ
/TT6 1 Tf
0 Tc 3.8304 0 Td
(\373)Tj
/TT5 1 Tf
0.329 0 Td
(C)Tj
ET
/CS0 cs 1 1 1 scn
505.68 577.98 42.48 8.34 re
f
BT
0 g
/TT5 1 Tf
-0.0032 Tc 0.00639 Tw 6.5428 0 0 6.5419 506.9999 580.2 Tm
[(R)-8.8 (M)-0.4 (S)10.9 (=)-9.5 ( 0.)-11.2 (32)-9.9 ( nm)]TJ
ET
q
350.76 470.4 7.74 94.2 re
W n
q
8.16 0 0 94.2 350.7 470.4 cm
-4.829 TL /Im6 Do
Q
Q
BT
/TT5 1 Tf
0.00211 Tc 0 Tw 5.9027 0 0 5.9018 342.66 566.88 Tm
(nm)Tj
-0.002 Tc -0.8538 -13.6637 Td
[(-0)6.8 (.5)]TJ
0 Tc 0.8538 2.4704 Td
(0)Tj
-0.0088 Tc -0.2846 8.0518 Td
[(1.)-6 (5)]TJ
0 Tc 0.2846 -2.6433 Td
(1)Tj
-0.0007 Tc -0.5794 -2.4704 Td
(0.5)Tj
ET
q
350.76 470.4 7.74 94.2 re
W n
q
8.16 0 0 94.2 350.7 470.4 cm
-4.829 TL /Im6 Do
Q
Q
BT
/TT5 1 Tf
0.00211 Tc 5.9027 0 0 5.9018 342.66 566.88 Tm
(nm)Tj
-0.002 Tc -0.8538 -13.6637 Td
[(-0)6.8 (.5)]TJ
0 Tc 0.8538 2.4704 Td
(0)Tj
-0.0088 Tc -0.2846 8.0518 Td
[(1.)-6 (5)]TJ
0 Tc 0.2846 -2.6433 Td
(1)Tj
-0.0007 Tc -0.5794 -2.4704 Td
(0.5)Tj
0.0058 Tc 11.0999 7.6858 Td
(\265m)Tj
17.0362 -0.3253 Td
(\265m)Tj
0 5.9027 -5.9018 0 356.28 614.28 Tm
(\265m)Tj
0.2744 -17.6082 Td
(\265m)Tj
ET
q
415.8 523.5 88.62 29.7 re
W n
q
88.8 0 0 29.7 415.8 523.5 cm
-4.829 TL /Im7 Do
Q
Q
q
415.8 493.8 88.62 29.7 re
W n
q
88.8 0 0 29.7 415.8 493.8 cm
-4.829 TL /Im8 Do
Q
Q
q
415.8 464.34 88.62 29.46 re
W n
q
88.8 0 0 29.7 415.8 464.1 cm
-4.829 TL /Im9 Do
Q
Q
BT
/TT5 1 Tf
0 Tc 5.9027 0 0 5.9018 413.16 465.6 Tm
(0)Tj
4.3214 Tc 5.3975 -0.854 Td
(12)Tj
0 Tc 9.6464 -0.0407 Td
(3)Tj
-14.4746 0 Td
(0)Tj
ET
/CS0 cs 1 1 1 scn
458.52 469.98 42.6 8.34 re
f
BT
0 g
/TT5 1 Tf
-0.0036 Tc 0.00681 Tw 6.5428 0 0 6.5419 460.56 472.26 Tm
[(RMS= 0.)-11.6 (4)-10.3 (3)-1.1 ( nm)]TJ
0 Tc 0 Tw 5.9027 0 0 5.9018 411.42 492.72 Tm
(1)Tj
T*
(2)Tj
0 4.8392 TD
(3)Tj
-0.0007 Tc 7.1116 0 0 7.1107 449.88 554.04 Tm
[(PD)5.3 (A)-10.6 (-)-226.1 (6)-8.5 (0)-0.1 (0)]TJ
/TT6 1 Tf
0 Tc [-0.3 (\373)]TJ
/TT5 1 Tf
4.1594 0 Td
(C)Tj
0.0058 Tc 5.9027 0 0 5.9018 456.78 452.64 Tm
(\265m)Tj
0 5.9027 -5.9018 0 411.6 506.7 Tm
(\265m)Tj
ET
q
415.8 523.5 88.62 29.7 re
W n
q
88.8 0 0 29.7 415.8 523.5 cm
-4.8392 TL /Im7 Do
Q
Q
q
415.8 493.8 88.62 29.7 re
W n
q
88.8 0 0 29.7 415.8 493.8 cm
-4.8392 TL /Im8 Do
Q
Q
q
415.8 464.34 88.62 29.46 re
W n
q
88.8 0 0 29.7 415.8 464.1 cm
-4.8392 TL /Im9 Do
Q
Q
BT
/TT5 1 Tf
0 Tc 5.9027 0 0 5.9018 413.16 465.6 Tm
(0)Tj
4.3214 Tc 5.3975 -0.854 Td
(12)Tj
0 Tc 9.6464 -0.0407 Td
(3)Tj
-14.4746 0 Td
(0)Tj
ET
/CS0 cs 1 1 1 scn
458.52 469.98 42.6 8.34 re
f
BT
0 g
/TT5 1 Tf
-0.0036 Tc 0.00681 Tw 6.5428 0 0 6.5419 460.56 472.26 Tm
[(RMS= 0.)-11.6 (4)-10.3 (3)-1.1 ( nm)]TJ
0 Tc 0 Tw 5.9027 0 0 5.9018 411.42 492.72 Tm
(1)Tj
0 4.829 TD
(2)Tj
0 4.8392 TD
(3)Tj
-0.0007 Tc 7.1116 0 0 7.1107 449.88 554.04 Tm
[(PD)5.3 (A)-10.6 (-)-226.1 (6)-8.5 (0)-0.1 (0)]TJ
/TT6 1 Tf
0 Tc [-0.3 (\373)]TJ
/TT5 1 Tf
4.1594 0 Td
(C)Tj
0.0058 Tc 5.9027 0 0 5.9018 456.78 452.64 Tm
(\265m)Tj
0 5.9027 -5.9018 0 411.6 506.7 Tm
(\265m)Tj
ET
q
339.12 866.4 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 866.4 cm
-4.8392 TL /Im10 Do
Q
Q
q
339.12 858 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 858 cm
-4.8392 TL /Im11 Do
Q
Q
q
339.12 849.6 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 849.6 cm
-4.8392 TL /Im12 Do
Q
Q
q
339.12 841.2 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 841.2 cm
-4.8392 TL /Im13 Do
Q
Q
q
339.12 832.8 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 832.8 cm
-4.8392 TL /Im14 Do
Q
Q
q
339.12 824.4 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 824.4 cm
-4.8392 TL /Im15 Do
Q
Q
q
339.12 816 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 816 cm
-4.8392 TL /Im16 Do
Q
Q
q
339.12 807.6 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 807.6 cm
-4.8392 TL /Im17 Do
Q
Q
q
339.12 799.2 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 799.2 cm
-4.8392 TL /Im18 Do
Q
Q
q
339.12 790.8 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 790.8 cm
-4.8392 TL /Im19 Do
Q
Q
q
339.12 782.4 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 782.4 cm
-4.8392 TL /Im20 Do
Q
Q
q
339.12 774 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 774 cm
-4.8392 TL /Im21 Do
Q
Q
q
339.12 765.6 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 765.6 cm
-4.8392 TL /Im22 Do
Q
Q
q
339.12 757.2 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 757.2 cm
-4.8392 TL /Im23 Do
Q
Q
q
339.12 748.8 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 748.8 cm
-4.8392 TL /Im24 Do
Q
Q
q
339.12 741.78 213.24 7.02 re
W n
q
213.6 0 0 7.2 339.12 741.6 cm
-4.8392 TL /Im25 Do
Q
Q
BT
/CS0 cs 0 0.2 0.8 scn
/TT5 1 Tf
0.0009 Tc 6.8543 0 0 6.8548 355.56 846.42 Tm
[(60)8.8 (0 )]TJ
/TT6 1 Tf
0 Tc 1.7332 0 Td
(\373)Tj
/TT5 1 Tf
0.0047 Tc [0.4 (C_)12.5 (R)7.5 (T)0.9 (P)]TJ
1 0 0 scn
-0.0079 Tc -2.1272 -4.6479 Td
[(50)-8.8 (0 )]TJ
/TT6 1 Tf
0 Tc [-0.3 (\373)]TJ
/TT5 1 Tf
0.0054 Tc [0.4 (C_)13.2 (RT)10.3 (P)]TJ
0 g
0.0079 Tc 1.0067 -4.7529 Td
[(As)12.9 (-d)19.3 (e)21.1 (p)1.8 (o)11.5 (s)4.2 (i)8.4 (t)13.2 (e)12.4 (d)]TJ
-0.0013 Tc 5.0333 11.7116 Td
[(STO\()3.8 (11)6.6 (0)-10.9 (\))]TJ
-0.00031 Tc 5.8474 -4.0439 Td
[(S)8.4 (T)-4.1 (O\()4.8 (1)7.6 (11\))]TJ
-0.0013 Tc 5.2434 0.7265 Td
[(STO\()3.8 (20)6.6 (0)-10.9 (\))]TJ
-0.00031 Tc 7.4581 -0.8491 Td
[(S)8.4 (T)-4.1 (O\()4.8 (2)7.6 (11\))]TJ
8.7877 0 0 8.7881 477.12 863.52 Tm
(Si/SiO)Tj
0 Tc 5.3897 0 0 5.3902 499.3799 863.52 Tm
(2)Tj
-0.00191 Tc 0.0011 Tw 8.7877 0 0 8.7881 502.14 863.52 Tm
[(/S)-7.2 (TO)5.2 ( \(45nm\))]TJ
0 Tc 0 Tw -7.3945 -15.464 Td
(2)Tj
/C2_0 1 Tf
0.5053 0 Td
<0219>Tj
/TT5 1 Tf
-0.0043 Tc 0.7647 0 Td
[(\(d)-7.1 (e)-6.1 (g)-1.3 (\))]TJ
0.0032 Tc -0.004 Tw 0 8.7877 -8.7881 0 334.62 779.8199 Tm
[(C)6.8 (o)1.4 (unt)15.3 (s \(a.)10.8 (u)0.4 (.\))]TJ
-0.0016 Tc 0 Tw 8.7877 0 0 8.7881 339.06 736.26 Tm
(20)Tj
5.8104 -0.0341 Td
(30)Tj
5.8241 0.0341 Td
(40)Tj
5.9675 -0.0341 Td
(50)Tj
5.9743 0.0341 Td
(60)Tj
ET
q
339.12 866.4 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 866.4 cm
-4.8392 TL /Im10 Do
Q
Q
q
339.12 858 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 858 cm
-4.8392 TL /Im11 Do
Q
Q
q
339.12 849.6 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 849.6 cm
-4.8392 TL /Im12 Do
Q
Q
q
339.12 841.2 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 841.2 cm
-4.8392 TL /Im13 Do
Q
Q
q
339.12 832.8 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 832.8 cm
-4.8392 TL /Im14 Do
Q
Q
q
339.12 824.4 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 824.4 cm
-4.8392 TL /Im15 Do
Q
Q
q
339.12 816 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 816 cm
-4.8392 TL /Im16 Do
Q
Q
q
339.12 807.6 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 807.6 cm
-4.8392 TL /Im17 Do
Q
Q
q
339.12 799.2 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 799.2 cm
-4.8392 TL /Im18 Do
Q
Q
q
339.12 790.8 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 790.8 cm
-4.8392 TL /Im19 Do
Q
Q
q
339.12 782.4 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 782.4 cm
-4.8392 TL /Im20 Do
Q
Q
q
339.12 774 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 774 cm
-4.8392 TL /Im21 Do
Q
Q
q
339.12 765.6 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 765.6 cm
-4.8392 TL /Im22 Do
Q
Q
q
339.12 757.2 213.24 8.4 re
W n
q
213.6 0 0 8.4 339.12 757.2 cm
-4.8392 TL /Im23 Do
Q
Q
q
339.12 748.8 213.24 8.4 re
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213.6 0 0 8.4 339.12 748.8 cm
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339.12 741.78 213.24 7.02 re
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213.6 0 0 7.2 339.12 741.6 cm
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[(60)8.8 (0 )]TJ
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(\373)Tj
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1 0 0 scn
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[(50)-8.8 (0 )]TJ
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[(As)12.9 (-d)19.3 (e)21.1 (p)1.8 (o)11.5 (s)4.2 (i)8.4 (t)13.2 (e)12.4 (d)]TJ
-0.0013 Tc 5.0333 11.7116 Td
[(STO\()3.8 (11)6.6 (0)-10.9 (\))]TJ
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[(S)8.4 (T)-4.1 (O\()4.8 (1)7.6 (11\))]TJ
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[(STO\()3.8 (20)6.6 (0)-10.9 (\))]TJ
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[(S)8.4 (T)-4.1 (O\()4.8 (2)7.6 (11\))]TJ
8.7877 0 0 8.7881 477.12 863.52 Tm
(Si/SiO)Tj
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<0219>Tj
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