Measurement of the electron energy distribution function in an argon radio-frequency discharge in the γ mode

CM Deegan, JP Goss, D Vender and MB Hopkins
Applied Physics Letters
74
1969–1971
1999

The α–γ transition in an argon radio-frequency discharge has been measured using Langmuir probes and a current-voltage monitor. At two pressures, bi-Maxwellian electron energy distribution functions were measured in the γ mode. Increasing the gas pressure results in a decrease in the high-energy component of the electron energy distribution function. A transition region in the current-voltage characteristic is also observed.

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