PVD Processes
Evaporation
- Heat metal under vacuum to create vapour stream
- Resistive
- Electron Beam
- Hollow cathode
- Arc
- React with nitrogen in the gas to form compound
Sputtering
- Create glow discharge in low pressure inert gas by putting negative voltage on metal target
- Gas ions accelerated towards metal target, where they impact and remove material
- React with nitrogen in the gas to form compound