CVD Tool Coatings
Multilayer tool coatings developed in the 1970s
Combinations of TiC, TiCN, TiN, HfN and Alumina
Suppress crater wear, flank wear and built-up edge
High process temperatures give good adhesion
Tensile thermal stresses, most severe at corners, initiate fracture - sharp tools cannot be coated (tools are honed to remove sharp edges)